{"id":5013,"date":"2019-01-09T13:46:09","date_gmt":"2019-01-09T12:46:09","guid":{"rendered":"http:\/\/www.cinam.univ-mrs.fr\/cinam\/lithography\/"},"modified":"2022-09-12T10:17:17","modified_gmt":"2022-09-12T08:17:17","slug":"lithography","status":"publish","type":"page","link":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/en\/lithography\/","title":{"rendered":"Lithography"},"content":{"rendered":"
\n\t\n\t\t\n\t\t\t\n\t\t\tPLANETE\t\t<\/span>\n\t<\/a>\n<\/div>\n<\/div><\/div><\/div>
\n\t\n\t\t\n\t\t\t\n\t\t\tNanofab\t\t<\/span>\n\t<\/a>\n<\/div>\n<\/div><\/div><\/div>
\n\t\n\t\t\n\t\t\t\n\t\t\tLithography\t\t<\/span>\n\t<\/a>\n<\/div>\n<\/div><\/div><\/div>
\n\t\n\t\t\n\t\t\t\n\t\t\tDeposition\t\t<\/span>\n\t<\/a>\n<\/div>\n<\/div><\/div><\/div>
\n\t\n\t\t\n\t\t\t\n\t\t\tEtching\t\t<\/span>\n\t<\/a>\n<\/div>\n<\/div><\/div><\/div>
\n\t\n\t\t\n\t\t\t\n\t\t\tMetrology\t\t<\/span>\n\t<\/a>\n<\/div>\n<\/div><\/div><\/div><\/div><\/div>
\n\t

Optical and electron beam lithography<\/h3>\t\t\t\t\t
\n\t\t\t\t\t\t
<\/div>\n\t\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n<\/div><\/div><\/div><\/div>
\n
\n\t

\"Lithography\"<\/p>\n

Metal lines
\n(width < 20 nm)<\/p>\n<\/div>\n<\/div><\/div><\/div>

\n
\n\t

\"Lithography<\/p>\n

Metal nanodots Cr\/Au
\n(diameter < 50 nm)<\/p>\n<\/div>\n<\/div><\/div><\/div>

\n
\n\t

\"Lithography<\/p>\n

Alignment of two layers
using e-beam lithography<\/p>\n<\/div>\n<\/div><\/div><\/div><\/div><\/div>

\n\t

High resolution e-beam lithography + lift off process<\/h3>\t\t\t\t\t
\n\t\t\t\t\t\t
<\/div>\n\t\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n<\/div><\/div><\/div><\/div>

Pioneer e-beam lithography toolc(Raith)<\/h3>\n
\n\t
    \n
  • Field Emission Gun (FEG) 2nm<\/li>\n
  • 5x5 cm Laser Interferometer Stage<\/li>\n
  • Stitching and Alignement <20nm<\/li>\n
  • Autofocus system<\/li>\n<\/ul>\n<\/div>\n<\/div><\/div><\/div>

    MJB4 Mask Aligner (S\u00fcss Microtec)<\/h3>\n
    \n\t
      \n
    • UV Lithography<\/li>\n
    • Filtered light at 365nm<\/li>\n
    • Resolution 0.8\u00b5m<\/li>\n
    • Wafer sizes up to 4\" (100mm)<\/li>\n
    • Realignment precision <1\u00b5m<\/li>\n<\/ul>\n<\/div>\n<\/div><\/div><\/div>

      \u00b5MLA Maskless Lithography (Heidelberg Instruments)<\/h3>\n
      \n\t
        \n
      • Maskless UV lithography<\/li>\n
      • 365nm light<\/li>\n
      • Resolution 1 \u00b5m<\/li>\n
      • Wafer size up to 100 mm<\/li>\n
      • Alignment precision 1 \u00b5m<\/li>\n<\/ul>\n<\/div>\n<\/div><\/div><\/div><\/div><\/div><\/div>","protected":false},"excerpt":{"rendered":"

        PLANETE Nanofab Lithography Deposition Etching Metrology Optical and electron beam lithography Metal lines (width < 20 nm) Metal nanodots Cr\/Au (diameter < 50 nm) Alignment of two layers using e-beam lithography High resolution e-beam lithography + lift off process Pioneer e-beam lithography toolc(Raith) Field Emission Gun (FEG) 2nm 5×5 cm Laser Interferometer Stage Stitching and <\/p>\n","protected":false},"author":14,"featured_media":0,"parent":0,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"page-templates\/full-page.php","meta":[],"aioseo_notices":[],"_links":{"self":[{"href":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/en\/wp-json\/wp\/v2\/pages\/5013"}],"collection":[{"href":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/en\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/en\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/en\/wp-json\/wp\/v2\/users\/14"}],"replies":[{"embeddable":true,"href":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/en\/wp-json\/wp\/v2\/comments?post=5013"}],"version-history":[{"count":19,"href":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/en\/wp-json\/wp\/v2\/pages\/5013\/revisions"}],"predecessor-version":[{"id":10701,"href":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/en\/wp-json\/wp\/v2\/pages\/5013\/revisions\/10701"}],"wp:attachment":[{"href":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/en\/wp-json\/wp\/v2\/media?parent=5013"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}