{"id":5044,"date":"2019-01-09T14:43:26","date_gmt":"2019-01-09T13:43:26","guid":{"rendered":"http:\/\/www.cinam.univ-mrs.fr\/cinam\/nanofabrication-2\/"},"modified":"2025-07-09T14:25:13","modified_gmt":"2025-07-09T12:25:13","slug":"nanofabrication-2","status":"publish","type":"page","link":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/en\/nanofabrication-2\/","title":{"rendered":"Nanofabrication"},"content":{"rendered":"
\n\t\n\t\t\n\t\t\t\n\t\t\tPLANETE\t\t<\/span>\n\t<\/a>\n<\/div>\n<\/div><\/div><\/div>
\n\t\n\t\t\n\t\t\t\n\t\t\tNanofab\t\t<\/span>\n\t<\/a>\n<\/div>\n<\/div><\/div><\/div>
\n\t\n\t\t\n\t\t\t\n\t\t\tLithography\t\t<\/span>\n\t<\/a>\n<\/div>\n<\/div><\/div><\/div>
\n\t\n\t\t\n\t\t\t\n\t\t\tDeposition\t\t<\/span>\n\t<\/a>\n<\/div>\n<\/div><\/div><\/div>
\n\t\n\t\t\n\t\t\t\n\t\t\tEtching\t\t<\/span>\n\t<\/a>\n<\/div>\n<\/div><\/div><\/div>
\n\t\n\t\t\n\t\t\t\n\t\t\tMetrology\t\t<\/span>\n\t<\/a>\n<\/div>\n<\/div><\/div><\/div><\/div><\/div>
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Nanofabrication<\/h3>\t\t\t\t\t
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      Plasmonic structures, LP3 - CINaM collaboration<\/h4>\n

      Gold nanostructure arrays obtained by e-beam lithography<\/p>\n<\/div>\n<\/div><\/div><\/div>

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        Deposition of nano-objects<\/h4>\n

        Tungsten nanowire array<\/p>\n<\/div>\n<\/div><\/div><\/div>

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          Local Focused Ion Beam (FIBID) and Electron Beam Induced Deposition (EBID)<\/h4>\n

          Tungsten nanodots deposition (EBID)<\/p>\n<\/div>\n<\/div><\/div><\/div><\/div><\/div>

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          Configuration of nanofabrication tools<\/h3>\t\t\t\t\t
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          <\/div>\n\t\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n<\/div><\/div><\/div><\/div>

          PIONEER System (RAITH GMBH)<\/h3>\n
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          • Hot cathode field emission electron gun (FEG)<\/li>\n
          • Electron column (100eV to 30 keV)<\/li>\n
          • Maximum e-beam current >1nA<\/li>\n
          • The focused beam size <2nm<\/li>\n
          • Back-scattered and secondary electron detectors (in-lens and out-lens)<\/li>\n
          • Interferometric stage 5cmx5cm (accuracy <20nm)<\/li>\n
          • Tilt module 0 to 90\u00b0<\/li>\n
          • GDSII Editor<\/li>\n<\/ul>\n

            Gas injection system (Orsay Physics)<\/p>\n

            6 injection lines<\/p>\n

              \n
            • Platinum<\/li>\n
            • Tungsten<\/li>\n
            • Silicon oxide<\/li>\n
            • Xenon fluoride (for etching)<\/li>\n
            • Water vapor<\/li>\n
            • Purging line<\/li>\n<\/ul>\n<\/div>\n<\/div><\/div><\/div>

              FIB-SEM Equipment (Helios 5 UC ThermoFisher)<\/h3>\n
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              • \n

                Elstar electron column with UC+ technology<\/h4>\n<\/li>\n
              • \n

                Tomahawk HT Ga\u207a focused ion beam (FIB) column with Fast Beam Blanker<\/h4>\n<\/li>\n
              • \n

                3 gas injection systems (Pt, W, C)<\/h4>\n<\/li>\n
              • \n

                EasyLift EX nanomanipulator<\/h4>\n<\/li>\n
              • \n

                Oxford Ultim Max 100 mm\u00b2 EDS<\/h4>\n<\/li>\n
              • \n

                RAITH Elphy MultiBeam lithography system<\/h4>\n<\/li>\n<\/ul>\n<\/div>\n<\/div><\/div><\/div><\/div><\/div>
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                \n\t

                The Helios 5 UC system was acquired and installed in 2025. It was co-funded by the French government and local authorities (R\u00e9gion Sud and Ville de Marseille) as part of the State-Region Planning Contract (CPER 2021\u20132027) and the Priority Research Equipment and Program (PEPR Electronique).<\/p>\n

                The PIONEER station was obtained in 2012 within the framework of a European FEDER project with the support of South PACA Region, Conseil G\u00e9n\u00e9ral des Bouches du Rh\u00f4ne, Aix-Marseille University, C'Nano PACA.<\/p>\n

                \"Nanofabrication\"<\/p>\n<\/div>\n<\/div><\/div><\/div><\/div><\/div><\/div>","protected":false},"excerpt":{"rendered":"

                PLANETE Nanofab Lithography Deposition Etching Metrology Nanofabrication Plasmonic structures, LP3 – CINaM collaboration Gold nanostructure arrays obtained by e-beam lithography Deposition of nano-objects Tungsten nanowire array Local Focused Ion Beam (FIBID) and Electron Beam Induced Deposition (EBID) Tungsten nanodots deposition (EBID) Configuration of nanofabrication tools PIONEER System (RAITH GMBH) Hot cathode field emission electron gun <\/p>\n","protected":false},"author":14,"featured_media":0,"parent":0,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"page-templates\/full-page.php","meta":[],"aioseo_notices":[],"_links":{"self":[{"href":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/en\/wp-json\/wp\/v2\/pages\/5044"}],"collection":[{"href":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/en\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/en\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/en\/wp-json\/wp\/v2\/users\/14"}],"replies":[{"embeddable":true,"href":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/en\/wp-json\/wp\/v2\/comments?post=5044"}],"version-history":[{"count":33,"href":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/en\/wp-json\/wp\/v2\/pages\/5044\/revisions"}],"predecessor-version":[{"id":13936,"href":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/en\/wp-json\/wp\/v2\/pages\/5044\/revisions\/13936"}],"wp:attachment":[{"href":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/en\/wp-json\/wp\/v2\/media?parent=5044"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}