{"id":11885,"date":"2023-03-21T10:30:20","date_gmt":"2023-03-21T09:30:20","guid":{"rendered":"http:\/\/www.cinam.univ-mrs.fr\/cinam\/?p=11885"},"modified":"2023-03-21T10:35:50","modified_gmt":"2023-03-21T09:35:50","slug":"the-cinam-is-promoted-by-j-vac-sci-techno-as-editors","status":"publish","type":"post","link":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/en\/2023\/03\/21\/the-cinam-is-promoted-by-j-vac-sci-techno-as-editors\/","title":{"rendered":"The CINaM is promoted by J. Vac. Sci. Techno. A\u2019s Editors"},"content":{"rendered":"<p><em>N-sources are critical in plasma-ALD of TiN.<\/em><\/p>\n<p><em>Their nature (NH3\u00a0or N<\/em><em>2<\/em><em>), their dilution, the plasma power as well as thermal treatments significantly modify the film properties and conductivity.\u00a0<\/em><\/p>\n<p><em>URL:\u00a0<\/em><a href=\"https:\/\/avs.scitation.org\/topic\/collections\/editors-pick?SeriesKey=jva\">https:\/\/avs.scitation.org\/topic\/collections\/editors-pick?SeriesKey=jva<\/a><\/p>\n<p><strong>Title<\/strong> : Conductive TiN thin films grown by plasma-enhanced atomic layer deposition: Effects of N-sources and thermal treatments<\/p>\n<p><strong>Auteurs :<\/strong> Cl\u00e9mence Badie, H\u00e9lo\u00efse Tissot, Beniamino Sciacca, Ma\u00efssa K.Barr, Julien Bachmann, Christophe Vall\u00e9e, Ga\u00ebl Gautier, Thomas Defforge, Vincent Asti\u00e9, Jean-Manuel Decams, Mikhael Bechelany,\u00a0Lionel\u00a0Santinacci*<\/p>\n<p><strong>Ref : <\/strong>\u00a0J. Vac. Sci. Techno. A. 41 (3), 032401 (2023)<\/p>\n<p><a href=\"https:\/\/doi.org\/10.1116\/6.0002288\">https:\/\/doi.org\/10.1116\/6.0002288<\/a><\/p>\n","protected":false},"excerpt":{"rendered":"<p>A new publication in Nanomaterials Department<\/p>\n","protected":false},"author":16,"featured_media":11882,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":[],"categories":[31],"tags":[],"aioseo_notices":[],"_links":{"self":[{"href":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/en\/wp-json\/wp\/v2\/posts\/11885"}],"collection":[{"href":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/en\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/en\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/en\/wp-json\/wp\/v2\/users\/16"}],"replies":[{"embeddable":true,"href":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/en\/wp-json\/wp\/v2\/comments?post=11885"}],"version-history":[{"count":3,"href":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/en\/wp-json\/wp\/v2\/posts\/11885\/revisions"}],"predecessor-version":[{"id":11888,"href":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/en\/wp-json\/wp\/v2\/posts\/11885\/revisions\/11888"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/en\/wp-json\/wp\/v2\/media\/11882"}],"wp:attachment":[{"href":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/en\/wp-json\/wp\/v2\/media?parent=11885"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/en\/wp-json\/wp\/v2\/categories?post=11885"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/en\/wp-json\/wp\/v2\/tags?post=11885"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}