{"id":4294,"date":"2015-05-06T14:16:51","date_gmt":"2015-05-06T12:16:51","guid":{"rendered":"http:\/\/www.cinam.univ-mrs.fr\/cinam\/?p=4294"},"modified":"2019-04-01T16:36:21","modified_gmt":"2019-04-01T14:36:21","slug":"chemical-alkaline-etching-of-silicon-mie-particles","status":"publish","type":"post","link":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/en\/2015\/05\/06\/chemical-alkaline-etching-of-silicon-mie-particles\/","title":{"rendered":"Chemical Alkaline Etching of Silicon Mie Particles"},"content":{"rendered":"<p>Collaboration between <a href=\"https:\/\/www.fresnel.fr\" target=\"_blank\" rel=\"noopener noreferrer\">Institut Fresnel<\/a> (Marseille), <a href=\"http:\/\/www.insp.jussieu.fr\/\" target=\"_blank\" rel=\"noopener noreferrer\">Institut des Nanosciences de Paris<\/a> and CINaM (<a href=\"http:\/\/www.cinam.univ-mrs.fr\/cinam\/team\/planete\/\" target=\"_blank\" rel=\"noopener noreferrer\">Plan\u00e8te<\/a>) resulted in fabrication of silicon Mie resonators and caracterisation of their optical properties. Chemical etching via alkaline solutions is associated with electronic lithography to structure at a nanometer scale silicon Mie resonators. Two different alkaline solutions are employed and their influences on the shape of the resonators are discussed.<\/p>\n<p><img decoding=\"async\" loading=\"lazy\" class=\"alignnone size-medium wp-image-4233\" src=\"http:\/\/www.cinam.univ-mrs.fr\/cinam\/wp-content\/uploads\/2019\/04\/400-300x239.jpg\" alt=\"\" width=\"300\" height=\"239\" srcset=\"https:\/\/www.cinam.univ-mrs.fr\/cinam\/wp-content\/uploads\/2019\/04\/400-300x239.jpg 300w, https:\/\/www.cinam.univ-mrs.fr\/cinam\/wp-content\/uploads\/2019\/04\/400.jpg 400w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/p>\n<p>This method avoids the use of reactive ion etching and appears to be very well adapted to design silicon particles at a nanometer scale for applications in nanophotonics.<\/p>\n<p>More information : \u00ab Chemical Alkaline Etching of Silicon Mie Particles \u00bb Julien Proust, Fr\u00e9d\u00e9ric Bedu, St\u00e9phane Chenot, Ibrahima Soumahoro, Igor Ozerov, Bruno Gallas, Redha Abdeddaim and Nicolas Bonod,<\/p>\n<p>Advanced Optical Materials, 3, 1280-1286 (2015)<\/p>\n<p>DOI : <a class=\"spip_out\" href=\"http:\/\/doi.org\/10.1002\/adom.201500146\" target=\"_blank\" rel=\"noopener noreferrer\">10.1002\/adom.201500146\u00a0<\/a><\/p>\n","protected":false},"excerpt":{"rendered":"<p>Collaboration between Institut Fresnel, Institut des Nanosciences de Paris and CINaM resulted in fabrication of silicon Mie resonators and caracterisation of their optical properties. <\/p>\n","protected":false},"author":14,"featured_media":4234,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":[],"categories":[31],"tags":[],"aioseo_notices":[],"_links":{"self":[{"href":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/en\/wp-json\/wp\/v2\/posts\/4294"}],"collection":[{"href":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/en\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/en\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/en\/wp-json\/wp\/v2\/users\/14"}],"replies":[{"embeddable":true,"href":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/en\/wp-json\/wp\/v2\/comments?post=4294"}],"version-history":[{"count":1,"href":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/en\/wp-json\/wp\/v2\/posts\/4294\/revisions"}],"predecessor-version":[{"id":4295,"href":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/en\/wp-json\/wp\/v2\/posts\/4294\/revisions\/4295"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/en\/wp-json\/wp\/v2\/media\/4234"}],"wp:attachment":[{"href":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/en\/wp-json\/wp\/v2\/media?parent=4294"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/en\/wp-json\/wp\/v2\/categories?post=4294"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/en\/wp-json\/wp\/v2\/tags?post=4294"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}