{"id":7462,"date":"2020-05-07T16:26:01","date_gmt":"2020-05-07T14:26:01","guid":{"rendered":"http:\/\/www.cinam.univ-mrs.fr\/cinam\/?p=7462"},"modified":"2020-05-19T23:00:42","modified_gmt":"2020-05-19T21:00:42","slug":"gruyere-or-emmental","status":"publish","type":"post","link":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/en\/2020\/05\/07\/gruyere-or-emmental\/","title":{"rendered":"Gruy\u00e8re or Emmental\u00a0?"},"content":{"rendered":"<p>The use of various Ti precursors for the growth of TiO<sub>2<\/sub> thin films by Atomic layer deposition (ALD) leads to layers exhibiting different porosities and properties.<\/p>\n<p>The work performed at the NM department of CINaM in collaboration with IM2NP, Schr\u00f6dinger Inc. and Encapsulix SAS shows that the reaction mechanisms depends on the pulsed precursor: TTIP* or TDMAT** during the TiO<sub>2<\/sub> growth. In one case the layer is porous and unstable while in the second case a pinhole-free film covers perfectly the surface. Such discrepancy is experimentally shown and explained by the simulation. In addition, it has a huge impact on the electrical properties of the films.<\/p>\n<p><strong>More details<\/strong>\u00a0: Dufond et al. Chem. Mater. 32, 1393 (2020)<\/p>\n<p><a href=\"https:\/\/dx.doi.org\/10.1021\/acs.chemmater.9b03621\">https:\/\/dx.doi.org\/10.1021\/acs.chemmater.9b03621<\/a><\/p>\n<p>* Titanium tetraisopropoxide<\/p>\n<p>** Tetrakisdmimethylaminotitanium<\/p>\n<p>&nbsp;<\/p>\n","protected":false},"excerpt":{"rendered":"<p>A new publication in NM Department  in collaboration with IM2NP, Schr\u00f6dinger Inc. and Encapsulix SAS<\/p>\n","protected":false},"author":16,"featured_media":7469,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":[],"categories":[31],"tags":[],"aioseo_notices":[],"_links":{"self":[{"href":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/en\/wp-json\/wp\/v2\/posts\/7462"}],"collection":[{"href":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/en\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/en\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/en\/wp-json\/wp\/v2\/users\/16"}],"replies":[{"embeddable":true,"href":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/en\/wp-json\/wp\/v2\/comments?post=7462"}],"version-history":[{"count":3,"href":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/en\/wp-json\/wp\/v2\/posts\/7462\/revisions"}],"predecessor-version":[{"id":7465,"href":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/en\/wp-json\/wp\/v2\/posts\/7462\/revisions\/7465"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/en\/wp-json\/wp\/v2\/media\/7469"}],"wp:attachment":[{"href":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/en\/wp-json\/wp\/v2\/media?parent=7462"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/en\/wp-json\/wp\/v2\/categories?post=7462"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/en\/wp-json\/wp\/v2\/tags?post=7462"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}