{"id":1616,"date":"2019-01-09T13:46:09","date_gmt":"2019-01-09T12:46:09","guid":{"rendered":"http:\/\/www.cinam.univ-mrs.fr\/cinam\/?page_id=1616"},"modified":"2022-09-12T10:02:40","modified_gmt":"2022-09-12T08:02:40","slug":"lithography","status":"publish","type":"page","link":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/lithography\/","title":{"rendered":"Lithographie"},"content":{"rendered":"
\n\t\n\t\t\n\t\t\t\n\t\t\tAccueil\t\t<\/span>\n\t<\/a>\n<\/div>\n<\/div><\/div><\/div>
\n\t\n\t\t\n\t\t\t\n\t\t\tNanofab\t\t<\/span>\n\t<\/a>\n<\/div>\n<\/div><\/div><\/div>
\n\t\n\t\t\n\t\t\t\n\t\t\tLithographie\t\t<\/span>\n\t<\/a>\n<\/div>\n<\/div><\/div><\/div>
\n\t\n\t\t\n\t\t\t\n\t\t\tD\u00e9p\u00f4t\t\t<\/span>\n\t<\/a>\n<\/div>\n<\/div><\/div><\/div>
\n\t\n\t\t\n\t\t\t\n\t\t\tGravure\t\t<\/span>\n\t<\/a>\n<\/div>\n<\/div><\/div><\/div>
\n\t\n\t\t\n\t\t\t\n\t\t\tM\u00e9trologie\t\t<\/span>\n\t<\/a>\n<\/div>\n<\/div><\/div><\/div><\/div><\/div>
\n\t

Lithographies optique et assist\u00e9e par faisceau d'\u00e9lectrons<\/h3>\t\t\t\t\t
\n\t\t\t\t\t\t
<\/div>\n\t\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n<\/div><\/div><\/div><\/div>
\n
\n\t

\"Lithography\"<\/p>\n

Lignes de m\u00e9tal
\n(largeur < 20 nm)<\/p>\n<\/div>\n<\/div><\/div><\/div>

\n
\n\t

\"Lithography<\/p>\n

Nanoplots de m\u00e9tal Cr\/Au
\n(diam\u00e8tre < 50 nm)<\/p>\n<\/div>\n<\/div><\/div><\/div>

\n
\n\t

\"Lithography<\/p>\n

Alignement de deux niveaux par lithographie \u00e9lectronique<\/p>\n<\/div>\n<\/div><\/div><\/div><\/div><\/div>

Syst\u00e8me Pioneer<\/h3>\n
\n\t
    \n
  • Source FEG (cathode chaude \u00e0 \u00e9mission de champ)<\/li>\n
  • Colonne \u00e9lectronique (100eV \u00e0 30 keV)<\/li>\n
  • Taille de sonde <2nm<\/li>\n
  • R\u00e9solution <20nm<\/li>\n
  • Platine interf\u00e9rom\u00e9trique 5cmx5cm (pr\u00e9cision <20nm)<\/li>\n
  • R\u00e9-alignement <20nm<\/li>\n<\/ul>\n<\/div>\n<\/div><\/div><\/div>

    Aligneur de masques MJB4 (S\u00fcss Microtec)<\/h3>\n
    \n\t
      \n
    • Lithographie UV<\/li>\n
    • Lumi\u00e8re filtr\u00e9e 365nm<\/li>\n
    • R\u00e9solution 0,8\u00b5m<\/li>\n
    • Taille de wafers jusqu\u2019\u00e0 100mm<\/li>\n
    • R\u00e9-alignement <1\u00b5m<\/li>\n<\/ul>\n<\/div>\n<\/div><\/div><\/div>

      Lithographie sans masques \u00b5MLA (Heidelberg)<\/h3>\n
      \n\t
        \n
      • Lithographie UV sans masque<\/li>\n
      • Lumi\u00e8re 365nm<\/li>\n
      • R\u00e9solution 1 \u00b5m<\/li>\n
      • Taille de wafers jusqu\u2019\u00e0 100mm<\/li>\n
      • R\u00e9-alignement 1 \u00b5m<\/li>\n<\/ul>\n<\/div>\n<\/div><\/div><\/div><\/div><\/div><\/div>","protected":false},"excerpt":{"rendered":"

        Accueil Nanofab Lithographie D\u00e9p\u00f4t Gravure M\u00e9trologie Lithographies optique et assist\u00e9e par faisceau d’\u00e9lectrons Lignes de m\u00e9tal (largeur < 20 nm) Nanoplots de m\u00e9tal Cr\/Au (diam\u00e8tre < 50 nm) Alignement de deux niveaux par lithographie \u00e9lectronique Syst\u00e8me Pioneer Source FEG (cathode chaude \u00e0 \u00e9mission de champ) Colonne \u00e9lectronique (100eV \u00e0 30 keV) Taille de sonde <2nm <\/p>\n","protected":false},"author":14,"featured_media":0,"parent":0,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"page-templates\/full-page.php","meta":[],"aioseo_notices":[],"_links":{"self":[{"href":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/wp-json\/wp\/v2\/pages\/1616"}],"collection":[{"href":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/wp-json\/wp\/v2\/users\/14"}],"replies":[{"embeddable":true,"href":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/wp-json\/wp\/v2\/comments?post=1616"}],"version-history":[{"count":54,"href":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/wp-json\/wp\/v2\/pages\/1616\/revisions"}],"predecessor-version":[{"id":10696,"href":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/wp-json\/wp\/v2\/pages\/1616\/revisions\/10696"}],"wp:attachment":[{"href":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/wp-json\/wp\/v2\/media?parent=1616"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}