{"id":1661,"date":"2019-01-09T14:43:26","date_gmt":"2019-01-09T13:43:26","guid":{"rendered":"http:\/\/www.cinam.univ-mrs.fr\/cinam\/?page_id=1661"},"modified":"2025-07-09T14:18:27","modified_gmt":"2025-07-09T12:18:27","slug":"nanofabrication","status":"publish","type":"page","link":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/nanofabrication\/","title":{"rendered":"Nanofabrication"},"content":{"rendered":"
\n\t\n\t\t\n\t\t\t\n\t\t\tAccueil\t\t<\/span>\n\t<\/a>\n<\/div>\n<\/div><\/div><\/div>
\n\t\n\t\t\n\t\t\t\n\t\t\tNanofab\t\t<\/span>\n\t<\/a>\n<\/div>\n<\/div><\/div><\/div>
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\n\t\n\t\t\n\t\t\t\n\t\t\tGravure\t\t<\/span>\n\t<\/a>\n<\/div>\n<\/div><\/div><\/div>
\n\t\n\t\t\n\t\t\t\n\t\t\tM\u00e9trologie\t\t<\/span>\n\t<\/a>\n<\/div>\n<\/div><\/div><\/div><\/div><\/div>
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D\u00e9p\u00f4t, lithographie et gravure assist\u00e9s par faisceau de particules charg\u00e9es<\/h2>\n<\/div>\n<\/div><\/div><\/div><\/div>
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Exemples de r\u00e9alisations<\/h3>\t\t\t\t\t
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      Structures plasmoniques, collaboration LP3 \u2013 CINaM<\/h4>\n

      R\u00e9seaux de nanostructures d\u2019or obtenus par litho \u00e9lectronique<\/p>\n<\/div>\n<\/div><\/div><\/div>

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        D\u00e9p\u00f4t des nano-objets<\/h4>\n

        R\u00e9seau de pointes de tungst\u00e8ne et Nanofil de platine connect\u00e9<\/p>\n<\/div>\n<\/div><\/div><\/div>

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          D\u00e9p\u00f4t local assist\u00e9 par faisceau d'ions focalis\u00e9s (FIBID) et par faisceau d'\u00e9lectrons (EBID)<\/h4>\n

          D\u00e9p\u00f4t de nano-plots de tungst\u00e8ne (EBID)<\/p>\n<\/div>\n<\/div><\/div><\/div><\/div><\/div>

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          Stations de Nanofabrication par faisceaux d'ions et d\u2019\u00e9lectrons focalis\u00e9s<\/h3>\t\t\t\t\t
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          <\/div>\n\t\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n<\/div><\/div><\/div><\/div><\/div>

          Syst\u00e8me PIONEER (RAITH GMBH)<\/h3>\n
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          • Source FEG (cathode chaude \u00e0 \u00e9mission de champ)<\/li>\n
          • Colonne \u00e9lectronique (100eV \u00e0 30 keV)<\/li>\n
          • Taille de sonde <2nm<\/li>\n
          • D\u00e9tecteurs d\u2019\u00e9lectrons r\u00e9trodiffus\u00e9s et secondaires in-lens et out-lens<\/li>\n
          • Platine interf\u00e9rom\u00e9trique 5cmx5cm (pr\u00e9cision <20nm)<\/li>\n
          • Module tilt 0 \u00e0 90\u00b0<\/li>\n
          • Editeur GDSII<\/li>\n<\/ul>\n

            Syst\u00e8me d\u2019injection de gaz (Orsay Physics)<\/h4>\n

            6 lignes d\u2019injection<\/p>\n

              \n
            • Platine<\/li>\n
            • Tungst\u00e8ne<\/li>\n
            • Oxyde de silicium<\/li>\n
            • Fluorure de xenon<\/li>\n
            • Vapeur d\u2019eau<\/li>\n
            • Purge<\/li>\n<\/ul>\n<\/div>\n<\/div><\/div><\/div>

              Equipement FIB-SEM (Helios 5 UC ThermoFisher)<\/h3>\n
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              Colonne \u00e9lectronique Elstar avec la technologie UC+<\/h4>\n

              Colonne FIB faisceau d'ions Ga+ focalis\u00e9 Tomahawk HT avec un Fast Beam Blanker<\/h4>\n

              3 syst\u00e8mes d\u2019injection de gaz\u00a0(Pt, W, C<\/strong>)<\/h4>\n

              NanoManipulateur EasyLift EX<\/h4>\n

              EDS Oxford Ultim Max 100mm\u00b2<\/h4>\n

              Syst\u00e8me de lithographie RAITH Elphy MultiBeam<\/h4>\n

               <\/p>\n<\/div>\n<\/div><\/div><\/div><\/div><\/div>

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              Le syst\u00e8me Helios 5 UC a \u00e9t\u00e9 acqui et install\u00e9 en 2025. Il a \u00e9t\u00e9 cofinanc\u00e9 par l\u2019\u00c9tat et les collectivit\u00e9s territoriales (R\u00e9gion Sud et Ville de Marseille) dans le cadre du Contrat de Plan \u00c9tat-R\u00e9gion (CPER 2021-2027) et du Programme et \u00c9quipement Prioritaire de Recherche (PEPR \u00e9lectronique).<\/p>\n

              Le syst\u00e8me PIONEER a \u00e9t\u00e9 obtenu en 2012 dans le cadre d\u2019un projet FEDER avec un soutien de : R\u00e9gion PACA, Conseil G\u00e9n\u00e9ral des Bouches du Rh\u00f4ne, Aix-Marseille Universit\u00e9, C\u2019Nano PACA.<\/p>\n

              \"Nanofabrication\"<\/p>\n<\/div>\n<\/div><\/div><\/div><\/div><\/div><\/div>","protected":false},"excerpt":{"rendered":"

              D\u00e9p\u00f4t, lithographie et gravure assist\u00e9s par faisceau de particules charg\u00e9es<\/p>\n","protected":false},"author":14,"featured_media":0,"parent":0,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"page-templates\/full-page.php","meta":[],"aioseo_notices":[],"_links":{"self":[{"href":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/wp-json\/wp\/v2\/pages\/1661"}],"collection":[{"href":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/wp-json\/wp\/v2\/users\/14"}],"replies":[{"embeddable":true,"href":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/wp-json\/wp\/v2\/comments?post=1661"}],"version-history":[{"count":50,"href":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/wp-json\/wp\/v2\/pages\/1661\/revisions"}],"predecessor-version":[{"id":13935,"href":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/wp-json\/wp\/v2\/pages\/1661\/revisions\/13935"}],"wp:attachment":[{"href":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/wp-json\/wp\/v2\/media?parent=1661"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}