{"id":1703,"date":"2019-01-09T15:21:11","date_gmt":"2019-01-09T14:21:11","guid":{"rendered":"http:\/\/www.cinam.univ-mrs.fr\/cinam\/?page_id=1703"},"modified":"2020-05-05T13:11:27","modified_gmt":"2020-05-05T11:11:27","slug":"gravure","status":"publish","type":"page","link":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/gravure\/","title":{"rendered":"Gravure"},"content":{"rendered":"
\n\t\n\t\t\n\t\t\t\n\t\t\tAccueil\t\t<\/span>\n\t<\/a>\n<\/div>\n<\/div><\/div><\/div>
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\n\t\n\t\t\n\t\t\t\n\t\t\tGravure\t\t<\/span>\n\t<\/a>\n<\/div>\n<\/div><\/div><\/div>
\n\t\n\t\t\n\t\t\t\n\t\t\tM\u00e9trologie\t\t<\/span>\n\t<\/a>\n<\/div>\n<\/div><\/div><\/div><\/div><\/div>
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Gravure (fabrication soustractive)<\/h3>\t\t\t\t\t
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\"Alcaline
Gravure du silicium par une attaque alcaline<\/figcaption><\/figure>\n<\/div>\n<\/div><\/div><\/div>
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Exemples de gravure anisotrope du Si par RIE<\/figcaption><\/figure>\n<\/div>\n<\/div><\/div><\/div>
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Gravure par attaque chimique (isotrope et anisotrope)<\/h4>\n

Gravure par plasma r\u00e9actif (RIE)<\/h4>\n

Gaz disponibles: CHF3<\/sub> SF6<\/sub> O2<\/sub><\/strong>\n<\/p>\n

Mat\u00e9riaux : Si SiO2<\/sub> Si3<\/sub>N4<\/sub> TiO2<\/sub> WO3<\/sub><\/strong><\/p>\n

Gravure de m\u00e9taux par plasma coupl\u00e9 inductivement (ICP)<\/h4>\n

Usinage ionique (Gravure par faisceau d\u2019argon)<\/h4>\n<\/div>\n<\/div><\/div><\/div><\/div><\/div>
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          Accueil Nanofab Lithographie D\u00e9p\u00f4t Gravure M\u00e9trologie Gravure (fabrication soustractive) Gravure du silicium par une attaque alcaline Exemples de gravure anisotrope du Si par RIE Gravure par attaque chimique (isotrope et anisotrope) Gravure par plasma r\u00e9actif (RIE) Gaz disponibles: CHF3 SF6 O2 Mat\u00e9riaux : Si SiO2 Si3N4 TiO2 WO3 Gravure de m\u00e9taux par plasma coupl\u00e9 inductivement <\/p>\n","protected":false},"author":14,"featured_media":0,"parent":0,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"page-templates\/full-page.php","meta":[],"aioseo_notices":[],"_links":{"self":[{"href":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/wp-json\/wp\/v2\/pages\/1703"}],"collection":[{"href":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/wp-json\/wp\/v2\/users\/14"}],"replies":[{"embeddable":true,"href":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/wp-json\/wp\/v2\/comments?post=1703"}],"version-history":[{"count":60,"href":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/wp-json\/wp\/v2\/pages\/1703\/revisions"}],"predecessor-version":[{"id":7444,"href":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/wp-json\/wp\/v2\/pages\/1703\/revisions\/7444"}],"wp:attachment":[{"href":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/wp-json\/wp\/v2\/media?parent=1703"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}