{"id":11879,"date":"2023-03-21T10:30:20","date_gmt":"2023-03-21T09:30:20","guid":{"rendered":"http:\/\/www.cinam.univ-mrs.fr\/cinam\/?p=11879"},"modified":"2023-03-21T10:30:20","modified_gmt":"2023-03-21T09:30:20","slug":"le-cinam-mis-a-lhonneur-par-les-editeurs-de-j-vac-sci-techno-a","status":"publish","type":"post","link":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/2023\/03\/21\/le-cinam-mis-a-lhonneur-par-les-editeurs-de-j-vac-sci-techno-a\/","title":{"rendered":"Le CINaM mis \u00e0 l\u2019honneur par les\u00a0\u00e9diteurs de \u00a0J. Vac. Sci.\u00a0Techno. A"},"content":{"rendered":"<p><em>Les sources d&rsquo;azote sont critiques dans le plasma-ALD du TiN.<\/em><\/p>\n<p><em>Leur nature (NH<\/em><em>3<\/em><em>\u00a0ou N2), leur dilution, la puissance du plasma ainsi que les traitements thermiques modifient significativement les propri\u00e9t\u00e9s et la conductivit\u00e9 du f<\/em><em>ilm<\/em>.<\/p>\n<p>Lien:\u00a0<a href=\"https:\/\/avs.scitation.org\/topic\/collections\/editors-pick?SeriesKey=jva\">https:\/\/avs.scitation.org\/topic\/collections\/editors-pick?SeriesKey=jva<\/a><\/p>\n<p><strong>Titre de l\u2019article<\/strong>:\u00a0Conductive TiN thin films grown by plasma-enhanced atomic layer deposition: Effects of N-sources and thermal treatments<\/p>\n<p><strong>Auteurs :<\/strong> Cl\u00e9mence Badie, H\u00e9lo\u00efse Tissot, Beniamino Sciacca, Ma\u00efssa K.Barr, Julien Bachmann, Christophe Vall\u00e9e, Ga\u00ebl Gautier, Thomas Defforge, Vincent Asti\u00e9, Jean-Manuel Decams, Mikhael Bechelany,\u00a0Lionel\u00a0Santinacci*<\/p>\n<p><strong>Ref : <\/strong>\u00a0J. Vac. Sci. Techno. A. 41 (3), 032401 (2023)<\/p>\n<p><a href=\"https:\/\/doi.org\/10.1116\/6.0002288\">https:\/\/doi.org\/10.1116\/6.0002288<\/a><\/p>\n","protected":false},"excerpt":{"rendered":"<p>Une nouvelle publication dans le D\u00e9partement Nanomat\u00e9riaux<\/p>\n","protected":false},"author":16,"featured_media":11881,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":[],"categories":[2],"tags":[],"aioseo_notices":[],"_links":{"self":[{"href":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/wp-json\/wp\/v2\/posts\/11879"}],"collection":[{"href":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/wp-json\/wp\/v2\/users\/16"}],"replies":[{"embeddable":true,"href":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/wp-json\/wp\/v2\/comments?post=11879"}],"version-history":[{"count":3,"href":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/wp-json\/wp\/v2\/posts\/11879\/revisions"}],"predecessor-version":[{"id":11884,"href":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/wp-json\/wp\/v2\/posts\/11879\/revisions\/11884"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/wp-json\/wp\/v2\/media\/11881"}],"wp:attachment":[{"href":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/wp-json\/wp\/v2\/media?parent=11879"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/wp-json\/wp\/v2\/categories?post=11879"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/wp-json\/wp\/v2\/tags?post=11879"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}