{"id":4244,"date":"2016-04-25T14:32:00","date_gmt":"2016-04-25T12:32:00","guid":{"rendered":"http:\/\/www.cinam.univ-mrs.fr\/cinam\/?p=4244"},"modified":"2019-04-01T15:35:19","modified_gmt":"2019-04-01T13:35:19","slug":"anti-reflets-en-silicium-nanostructure","status":"publish","type":"post","link":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/2016\/04\/25\/anti-reflets-en-silicium-nanostructure\/","title":{"rendered":"Anti-reflets en silicium nanostructur\u00e9"},"content":{"rendered":"<p>La nanostructuration d\u2019une surface de silicium permet de fortement diminuer la r\u00e9flectivit\u00e9 de la lumi\u00e8re visible \u00e0 l\u2019interface air-silicium. Cette structuration tr\u00e8s fine, plus fine que la longueur d\u2019onde de la lumi\u00e8re, est obtenue par la gravure d\u2019un r\u00e9seau de piliers en silicium carr\u00e9s de taille de 140 nm de large et 110 nm de haut espac\u00e9s de 100 nm. Ces param\u00e8tres ont \u00e9t\u00e9 optimis\u00e9s (d\u2019apr\u00e8s les simulations num\u00e9riques) pour \u00e9largir la tol\u00e9rance spectrale dans tout le domaine visible. Le traitement antireflet est efficace pour les angles d\u2019incidence jusqu\u2019\u00e0 40\u00b0 par rapport \u00e0 la normale pour les deux polarisations principales (s- et p-). Ce travail a \u00e9t\u00e9 r\u00e9alis\u00e9 en \u00e9troite collaboration entre <a class=\"spip_out\" href=\"http:\/\/www.fresnel.fr\">l\u2019Institut Fresnel<\/a> (Marseille) et le CINaM (<a class=\"spip_out\" href=\"https:\/\/www.cinam.univ-mrs.fr\/cinam\/team\/planete\/\" target=\"_blank\" rel=\"noopener noreferrer\">la plate-forme Plan\u00e8te<\/a>).<\/p>\n<figure id=\"attachment_4245\" aria-describedby=\"caption-attachment-4245\" style=\"width: 300px\" class=\"wp-caption aligncenter\"><img decoding=\"async\" loading=\"lazy\" class=\"wp-image-4245 size-medium\" src=\"https:\/\/www.cinam.univ-mrs.fr\/cinam\/wp-content\/uploads\/2019\/04\/image_1_avril_2016-300x155.jpg\" alt=\"\" width=\"300\" height=\"155\" \/><figcaption id=\"caption-attachment-4245\" class=\"wp-caption-text\">(a) Une image en microscopie optique montrant la fronti\u00e8re entre le silicium massif (\u00e0 gauche) et le silicium nanostructur\u00e9 (\u00e0 droite). A cause de la faible r\u00e9flectivit\u00e9, le silicium nanostructur\u00e9 apparait noir. (b) Une image en microscopie \u00e9lectronique montrant les nanopiliers de la structuration fine de silicium (l\u2019image est tilt\u00e9e \u00e0 65\u00b0).<\/figcaption><\/figure>\n<figure id=\"attachment_4247\" aria-describedby=\"caption-attachment-4247\" style=\"width: 300px\" class=\"wp-caption aligncenter\"><img decoding=\"async\" loading=\"lazy\" class=\"size-medium wp-image-4247\" src=\"https:\/\/www.cinam.univ-mrs.fr\/cinam\/wp-content\/uploads\/2019\/04\/image_2_2016-300x206.jpg\" alt=\"\" width=\"300\" height=\"206\" srcset=\"https:\/\/www.cinam.univ-mrs.fr\/cinam\/wp-content\/uploads\/2019\/04\/image_2_2016-300x206.jpg 300w, https:\/\/www.cinam.univ-mrs.fr\/cinam\/wp-content\/uploads\/2019\/04\/image_2_2016.jpg 400w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><figcaption id=\"caption-attachment-4247\" class=\"wp-caption-text\">Les principales \u00e9tapes de la nanofabrication (lithographie \u00e9lectronique, d\u00e9p\u00f4t du nickel par \u00e9vaporation, gravure par plasma r\u00e9actif et le retrait du masque de nickel) ont \u00e9t\u00e9 r\u00e9alis\u00e9es \u00e0 la plate-forme de micro et nanofabrication en salle blanche Plan\u00e8te.<\/figcaption><\/figure>\n<p><strong class=\"spip\"> <i class=\"spip\">Pour en savoir plus<\/i> <\/strong>\u00a0: \u00ab\u00a0Optimized 2D array of thin silicon pillars for efficient antireflective coatings in the visible spectrum\u00a0\u00bb\u00a0: Julien Proust, Anne-Laure Fehrembach, Fr\u00e9d\u00e9ric Bedu, Igor Ozerov, Nicolas Bonod,<\/p>\n<p>Sci. Rep. 6, 24947 (2016).<\/p>\n<p>DOI\u00a0: <a class=\"spip_out\" href=\"http:\/\/doi.org\/10.1038\/srep24947\" target=\"_blank\" rel=\"noopener noreferrer\">10.1038\/srep24947<\/a> (open access)<\/p>\n","protected":false},"excerpt":{"rendered":"<p>La nanostructuration d\u2019une surface de silicium permet de fortement diminuer la r\u00e9flectivit\u00e9 de la lumi\u00e8re visible \u00e0 l\u2019interface air-silicium. Cette structuration tr\u00e8s fine, plus fine que la longueur d\u2019onde de la lumi\u00e8re, est obtenue par la gravure d\u2019un r\u00e9seau de piliers en silicium carr\u00e9s de taille de 140 nm de large et 110 nm de <\/p>\n","protected":false},"author":14,"featured_media":4259,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":[],"categories":[2],"tags":[],"aioseo_notices":[],"_links":{"self":[{"href":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/wp-json\/wp\/v2\/posts\/4244"}],"collection":[{"href":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/wp-json\/wp\/v2\/users\/14"}],"replies":[{"embeddable":true,"href":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/wp-json\/wp\/v2\/comments?post=4244"}],"version-history":[{"count":3,"href":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/wp-json\/wp\/v2\/posts\/4244\/revisions"}],"predecessor-version":[{"id":4265,"href":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/wp-json\/wp\/v2\/posts\/4244\/revisions\/4265"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/wp-json\/wp\/v2\/media\/4259"}],"wp:attachment":[{"href":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/wp-json\/wp\/v2\/media?parent=4244"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/wp-json\/wp\/v2\/categories?post=4244"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.cinam.univ-mrs.fr\/cinam\/wp-json\/wp\/v2\/tags?post=4244"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}