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  • Deposition

Deposition

PLANETE
Nanofab
Lithography
Deposition
Etching
Metrology

Deposition (additive fabrication)

Evaporation
(Ag, Al, Au, Cr, Cu et Ni)

Magnetron sputtering (Al, Cr, Ti et W)

Reactive sputtering (nitrides and oxides)

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