Nanofabrication

• Hot cathode field emission electron gun (FEG)
• Electron column (100eV to 30 keV)
• Maximum e-beam current >1nA
• The focused beam size <2nm
• Back-scattered and secondary electron detectors (in-lens and out-lens)
• Interferometric stage 5cmx5cm (accuracy <20nm)
• Tilt module 0 to 90°
• GDSII Editor

Gas injection system (Orsay Physics)

6 injection lines

• Platinum
• Tungsten
• Silicon oxide
• Xenon fluoride (for etching)
• Water vapor
• Purging line

• Tungsten filament electron source
• Electron column (500eV to 30 keV)
• Focused beam size <20nm
• Out-lens secondary electron detector
• Tilt module 0 to 90°
• GDSII editor

Focused Ion Beam column (Ga+)

Gas Injection System

5 injection lines

• Platinum
• Tungsten
• Silicon oxide
• Carbon

In situ electrical measurement system

The PIONEER station was obtained in 2012 within the framework of a European FEDER project with the support of South PACA Region, Conseil Général des Bouches du Rhône, Aix-Marseille University, C'Nano PACA.