PLANETE

The clean room is equipped with numerous technological equipment and processes well adapted to the scientific projects carried out within the CINaM as well as in the different research institutes and laboratories of the region. The CINaM laboratory shares nano- and microtechnological equipment with the academic research community as well as with innovative companies carrying out research and development projects:

• Nanofabrication

- Focused charged particle beam assisted deposition, lithography and etching

• Lithography

- Optical and electron beam lithography

• Deposition

- Evaporative deposition of metals
- Deposition of metals (Al, Ti, W, Cr) by magnetron sputtering
- Deposition of SiO2, Si3N4 and metal oxydes and nitrides by reactive sputtering

• Etching

- Reactive Ion Etching (RIE) of Si, SiO2 and Si3N4 by fluorine-containing plasma
- Argon Ion Beam Etching (IBE) of metals (Co, Fe, Ni, Ti, Al) by inductively coupled plasma (ICP)
- Wet chemical etching

• Metrology

- Optical microscopy
- Contact profilometry
- Electrical measurements

The PLANETE platform is open to the regional research community as well as to innovative companies carrying out research and development projects. All the clean room facilities and the equipment are made available to realize their projects accompanied by a technical assistance from the platform team members according to their needs.

Platform users are welcomed by a technical team (Igor Ozerov, Frédéric Bedu and Romain Jeannette).

All users should accept to respect the PLANETE users' charter.

PLANETE users' charter

The hourly rate for the use of the clean room equipment for the academic partners (CNRS units, other EPST and academics) is:

• 64,887 €HT/hour.

For industrials, the hourly rates for the use of cleanroom equipment are:

• 118 €HT/hour (in autonomy, without assistance);
• 229 €HT/hour (with assistance by technical team).

The direction of the CINaM and all the staff of the PLANETE technological platform are involved in the quality approach aimed at reinforcing the reliability of the platform's equipment and the technological processes available within the platform.

Planète's quality policy (in French)

The Planète platform has received a label as a member of the regional network "Plateformes Technologiques du Site d’Aix-Marseille " (Technology Platforms at the Aix-Marseille area) approved by the Aix-Marseille University, the CNRS (French National Center for Scientific Research) and the INSERM (French National Institute for Health and Medical Research).

Charter of the label of Technology Platforms at the Aix-Marseille area (in French)

Since 2009, the Planet Platform has also been one of the three components of the regional proximity technology facility CT-PACA, accredited by the French Ministry of Higher Education, Research and lʼInnovation. The other two components of this technological facility are CRHEATec at the Sophia Antipolis site, hosted by the CRHEA, and NanoTecMat at the Marseille Saint Jérôme site, hosted by the IM2NP.

Within the national technological framework RENATECH+, Planète is associated with the NanoLyon technological facilities (INSA and École Centrale de Lyon) and the PTA technological platform in Grenoble.

In collaboration with IM2NP's NanoTecMat platform, Planète is among the winners of the structuring action "Potentialisation du développement des plateformes technologiques Aix-Marseille" financed by A*Midex in 2019. This project initiates a quality management approach within the two platforms and is accompanied and supported by "Direction de l’Amélioration Continue" (Continuous Improvement Department) of Aix-Marseille University.

Sofia Bekdouche, Quality Engineer on a 1-year A*Midex fixed-term contract, shares her time between the two platforms.

Planète's quality policy (in French)