Leader: Igor Ozerov

Activity stream

2 years ago


'PLANETE' - nano et micro-fabrication platform

To satisfy the demand for nanolithography, nanostructuring and nano-object connectivity, the Centre Interdisciplinaire de Nanoscience de Marseille (CINaM) has created the Planète technology platform.

Thanks to the strong involvement of the CNRS and the Aix-Marseille University, and the financial support of local authorities (City of Marseille, Bouches-du-Rhône General Council, Council of the South Provence-Alpes-Côte d'Azur Region), the Planète platform was created in 2006.

This platform, located in a 250 m² clean room and bringing together multiple technological facilities and equipment, is managed by a team of engineers who are responsible for its operation.


From 2009, the PLANETE platform is an integral part of the CT-PACA, a regional proximity technology facility, labelled by the French Ministry of Higher Education, Research and Innovation.

The PLANETE platform is open to the regional scientific research community as well as to innovative companies carrying out research and development projects. All the clean room facilities and the equipment are made available to realize their projects accompanied by a technical assistance from the platform staff according to their needs.

Recurring users of PLANETE are the research teams from CINaM and other institutes and research laboratories from Marseille area (e.g. LAI, IM2NP, IBDM, CIML, LP3, IUSTI, PIIM, Institut FRESNEL). The platform staff also participates in national (ESPCI, UPMC, UTT) and international (Spain, Germany, Latvia, South Korea) scientific collaborations.



Fabrication of sharp silicon arrays to wound Caenorhabditis elegans

Jérôme Belougne, Igor Ozerov, Céline Caillard, Bedu Frédéric, Jonathan Ewbank

Scientific Reports 10:3581 (2020)10.1038/s41598-020-60333-7

Optical spin-dependent beam separation in cyclic group symmetric metasurface

Yeon Ui Lee, Igor Ozerov, Frédéric Bedu, Ji Su Kim, Frédéric Fages, Jeong Weon Wu

Nanophotonics 9:3459-3471 (2020)10.1515/nanoph-2020-0160


Growth and orientation relationships of Ni and Cu films annealed on slightly miscut (1-102) r-sapphire substrates

Dominique Chatain, Blandine Courtois, Igor Ozerov, Nathalie Bozzolo, Madeleine Kelly, Gregory Rohrer, Paul Wynblatt

Journal of Crystal Growth 508:24-33 (2019)10.1016/j.jcrysgro.2018.11.024

Enhanced Four-Wave Mixing in Doubly Resonant Si Nanoresonators

Rémi Colom, Lei Xu, Loris Marini, Frédéric Bedu, Igor Ozerov, Thomas Begou, Julien Lumeau, Andrey Miroshnichenko, Dragomir Neshev, Boris Kuhlmey, Stefano Palomba, Nicolas Bonod

ACS photonics 6:1295-1301 (2019)10.1021/acsphotonics.9b00442


Ultra-narrow surface lattice resonances in plasmonic metamaterial arrays for biosensing applications

Artem Danilov, Gleb Tselikov, Fan Wu, Vasyl Kravets, Igor Ozerov, F. Bedu, Alexander N. Grigorenko, Andrei V. Kabashin

Biosensors and Bioelectronics 104:102-112 (2018)10.1016/j.bios.2017.12.001

Water adsorption by a sensitive calibrated gold plasmonic nanosensor

Benjamin Demirdjian, Frédéric Bedu, Alain Ranguis, Igor Ozerov, Claude Henry

Langmuir 34:5381-5385 (2018)10.1021/acs.langmuir.8b00040

Strong Nonlinear Optical Response in the Visible Spectral Range with Epsilon-Near-Zero Organic Thin Films

Yeon Ui Lee, Eleonora Garoni, Hanayo Kita, Kenji Kamada, Byung Hoon Woo, Young Chul Jun, Sang Min Chae, Hyo Jung Kim, Kwang Jin Lee, Seokhyun Yoon, Eunyoung Choi, Fabrice Mathevet, Igor Ozerov, Jean Charles Ribierre, Jeong Weon Wu, Anthony d'Aléo

Advanced Optical Materials 6:1701400 (2018)10.1002/adom.201701400

Live nanoscopic to mesoscopic topography reconstruction with an optical microscope for chemical and biological samples

Olivier Theodoly, Nicolas Garcia-Seyda, Frédéric Bedu, Xuan Luo, Sylvain Gabriele, Tam Mignot, Joanna Giermanska, Jean-Paul Chapel, Mélinda Métivier, Marie-Pierre Valignat

PLoS ONE 13:e0207881 (2018)10.1371/journal.pone.0207881


Ligand Nano-cluster Arrays in a Supported Lipid Bilayer

Emmanuelle Benard, Fuwei Pi, Igor Ozerov, Anne Charrier, Kheya Sengupta

Journal of visualized experiments : JoVE 122:e55060 (2017)10.3791/55060

High Aspect Ratio Sub-Micrometer Channels Using Wet Etching: Application to the Dynamics of Red Blood Cell Transiting through Biomimetic Splenic Slits

Priya Gambhire, Scott Atwell, Cécile Iss, Frédéric Bedu, Igor Ozerov, Catherine Badens, Emmanuèle Helfer, Annie Viallat, Anne Charrier

Small 13:1700967 (2017)10.1002/smll.201700967


Enhancement and Inhibition of Spontaneous Photon Emission by Resonant Silicon Nanoantennas

Dorian Bouchet, Mathieu Mivelle, Julien Proust, Bruno Gallas, Igor Ozerov, Maria F. Garcia-Parajo, Angelo Gulinatti, Ivan Rech, Yannick de Wilde, Nicolas Bonod, Valentina Krachmalnicoff, Sébastien Bidault

Physical Review Applied 6:064016 (2016)10.1103/PhysRevApplied.6.064016

Optimized 2D array of thin silicon pillars for efficient antireflective coatings in the visible spectrum

Julien Proust, Anne-Laure Fehrembach, Frédéric Bedu, Igor Ozerov, Nicolas Bonod

Scientific Reports 6:24947 (2016)10.1038/srep24947

All-Dielectric Colored Metasurfaces with Silicon Mie Resonators

Julien Proust, Frédéric Bedu, Bruno Gallas, Igor Ozerov, Nicolas Bonod

ACS Nano 10:7761-7767 (2016)10.1021/acsnano.6b03207

All-Dielectric Silicon Nanogap Antennas To Enhance the Fluorescence of Single Molecules

Raju Regmi, Johann Berthelot, Pamina M. Winkler, Mathieu Mivelle, Julien Proust, Frédéric Bedu, Igor Ozerov, Thomas Begou, Julien Lumeau, Hervé Rigneault, María F. García-Parajó, Sébastien Bidault, Jérôme Wenger, Nicolas Bonod

Nano Letters 16:5143-5151 (2016)10.1021/acs.nanolett.6b02076


The clean room is equipped with numerous technological equipment and processes well adapted to the scientific projects carried out within the CINaM as well as in the different research institutes and laboratories of the region. The CINaM laboratory shares nano- and microtechnological equipment with the academic research community as well as with innovative companies carrying out research and development projects:

- Focused charged particle beam assisted deposition, lithography and etching

- Optical and electron beam lithography

- Evaporative deposition of metals
- Deposition of metals (Al, Ti, W, Cr) by magnetron sputtering
- Deposition of SiO2, Si3N4 and metal oxydes and nitrides by reactive sputtering

- Reactive Ion Etching (RIE) of Si, SiO2 and Si3N4 by fluorine-containing plasma
- Argon Ion Beam Etching (IBE) of metals (Co, Fe, Ni, Ti, Al) by inductively coupled plasma (ICP)
- Wet chemical etching

  • Metrology

- Optical microscopy
- Contact profilometry
- Electrical measurements

Service offering

The PLANETE platform is open to the regional research community as well as to innovative companies carrying out research and development projects. All the clean room facilities and the equipment are made available to realize their projects accompanied by a technical assistance from the platform team members according to their needs.

Platform users are welcomed by a technical team (Igor Ozerov, Frédéric Bedu and Romain Jeannette).

All users should accept to respect the PLANETE users' charter.

PLANETE users' charter


The hourly rate for the use of the clean room equipment for the academic partners (CNRS units, other EPST and academics) is:

  • 64,887 €HT/hour.

For industrials, the hourly rates for the use of cleanroom equipment are:

  • 118 €HT/hour (in autonomy, without assistance);
  • 229 €HT/hour (with assistance by technical team).


The direction of the CINaM and all the staff of the PLANETE technological platform are involved in the quality approach aimed at reinforcing the reliability of the platform's equipment and the technological processes available within the platform.

Planète's quality policy (in French)


Plateforme Technologique Aix-MarseilleThe Planète platform has received a label as a member of the regional network "Plateformes Technologiques du Site d’Aix-Marseille " (Technology Platforms at the Aix-Marseille area) approved by the Aix-Marseille University, the CNRS (French National Center for Scientific Research) and the INSERM (French National Institute for Health and Medical Research).

Charter of the label of Technology Platforms at the Aix-Marseille area (in French)


Since 2009, the Planet Platform has also been one of the three components of the regional proximity technology facility CT-PACA, accredited by the French Ministry of Higher Education, Research and lʼInnovation. The other two components of this technological facility are CRHEATec at the Sophia Antipolis site, hosted by the CRHEA, and NanoTecMat at the Marseille Saint Jérôme site, hosted by the IM2NP.

Within the national technological framework RENATECH+, Planète is associated with the NanoLyon technological facilities (INSA and École Centrale de Lyon) and the PTA technological platform in Grenoble.

In collaboration with IM2NP's NanoTecMat platform, Planète is among the winners of the structuring action "Potentialisation du développement des plateformes technologiques Aix-Marseille" financed by A*Midex in 2019. This project initiates a quality management approach within the two platforms and is accompanied and supported by "Direction de l’Amélioration Continue" (Continuous Improvement Department) of Aix-Marseille University.

Sofia Bekdouche, Quality Engineer on a 1-year A*Midex fixed-term contract, shares her time between the two platforms.

Planète's quality policy (in French)