Etching PLANETE Nanofab Lithography Deposition Etching Metrology Etching (soustractive fabrication) Alcaline Wet Etching of Silicon Examples of anisotrope etching of Si by RIE Wet Chemical Etching (isotropic and anisotropic) Plasma-assisted Reactive Ion Etching (RIE) Available gases: CHF3 SF6 O2 Etched Materials : Si SiO2 Si3N4 TiO2 WO3 Metal etching by Inductively Coupled Plasma (ICP) Ion milling by large argon beam Polymer etching by oxygen plasma
Examples of anisotrope etching of Si by RIE
Examples of anisotrope etching of Si by RIE